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tsmc 做n3b 是euv+dsa -- 补充帖

euv+dsa 除了不能做bridge 其他cut,

Grating patterns with 18/21 nm pitch can be fabricated with two process flows

1)EUV printed 36/42 nm pitch + SADP

2)DSA rectified 36/42 nm pitch + SADP

euv做segment length能到8nm



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